发明名称 METHOD AND APPARATUS FOR NON-CONTACT METAL PLATING OF SEMICONDUCTOR WAFERS USING A BIPOLAR ELECTRODE ASSEMBLY
摘要 <p>Plating of metal interconnections in semiconductor wafer manufacturing is performed by providing relative motion between a bipolar electrode assembly and a single metallized surface of a semiconductor wafer without necessary physical contact with the wafer or direct electrical connection thereto.</p>
申请公布号 WO1999065071(A1) 申请公布日期 1999.12.16
申请号 US1999012918 申请日期 1999.06.09
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