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发明名称
Verfahren zur Herstellung einer Halbleiteranordnung mit einem Feldeffekttransistor mit leichtdotierten Source- und Drainschichten
摘要
申请公布号
DE69421607(D1)
申请公布日期
1999.12.16
申请号
DE19946021607
申请日期
1994.05.26
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK
发明人
BRADY, FREDERICK T.;BREITEN, CHARLES P.;HADDAD, NADIM F.;HOUSTON, WILLIAM G.;SPENCER, OLIVER S.;WRIGHT, STEVEN J.
分类号
H01L21/336;H01L21/8238;H01L29/78;H01L29/786;(IPC1-7):H01L21/336;H01L21/823
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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