发明名称 CAPACITANCE TYPE SENSOR
摘要 A capacitance type sensor comprising a first electrode (10a, 10b, 10c, 30) and a second electrode (20a, 20b, 20c, 20d) disposed opposite to and out of contact with each other with the gap between them changing with a change in detected amount, and a signal processing unit (4) for calculating a detected amount based on a capacitance formed between the first and second electrodes, wherein the first electrode is provided with a portion (12a, 14a) of which area opposite to the second electrode increases and a portion (12b, 14b) of which area opposite to the second electrode decreases according to a positional error produced in directions (x, y) parallel to the first electrode, these portions having the same area.
申请公布号 WO9964833(A1) 申请公布日期 1999.12.16
申请号 WO1999JP03038 申请日期 1999.06.08
申请人 YAMATAKE CORPORATION;ISHIKURA, YOSHIYUKI 发明人 ISHIKURA, YOSHIYUKI
分类号 G01K7/34;G01L1/14;G01L9/00;G01L9/12;(IPC1-7):G01L1/14 主分类号 G01K7/34
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