Method of manufacturing indiffused optical waveguide structures in a sub strate

摘要

The invention relates to a method of manufacturing an indiffused optical waveguide (6) in a substrate (1). A metal layer (7) and photoresist (8) are deposited on a substrate (1) in this order. Portions of the photoresist (8) are removed such that a photoresist structure (8) corresponding to the desired waveguide structure is left. The exposed portions of the metal layer (7) are removed by a chemical/physical etching technique whereafter the remaining photoresist (8) is removed and the remaining metal layer (7) is diffused into the substrate (1) by a heat treatment. The usage of a chemical/physical etching method for removing portions of the metal layer (7) results in smaller variations in the width of the waveguide after indiffusion. Such waveguides are particularly advantageous when being used in connection with acousto-optical devices. The optical waveguides according to the invention are also useable with other integrated optics devices.