| 摘要 |
Device and method for transferring wafers. The wafers are arranged in cassettes and have to be removed therefrom for feeding to a treatment device. To this end a lock construction is proposed having first and second openings arranged in line, each of which can be closed off by an individual closure. A cassette loaded with wafers is placed against a first opening, the closure of which is closed. The closure of the cassette is moved, together with the closure of the first opening, into the lock chamber, while, with the second opening closed, the lock chamber is purged together with the cassette.
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| 申请人 |
A.S.M. INTERNATIONAL N.V.;HASPER, ALBERT;HUUSSEN, FRANK;KOOIJMAN, CORNELIS, MARINUS;OOSTERLAKEN, THEODORUS, GERARDUS, MARIA;VAN PUTTEN, JACK, HERMAN;RIDDER, CHRISTIANUS, GERARDUS, MARIA;SNIJDERS, GERT-JAN;STOUTJESDIJK, JEROEN, JAN;ZINGER, JAN |
发明人 |
HASPER, ALBERT;HUUSSEN, FRANK;KOOIJMAN, CORNELIS, MARINUS;OOSTERLAKEN, THEODORUS, GERARDUS, MARIA;VAN PUTTEN, JACK, HERMAN;RIDDER, CHRISTIANUS, GERARDUS, MARIA;SNIJDERS, GERT-JAN;STOUTJESDIJK, JEROEN, JAN;ZINGER, JAN |
