| 发明名称 |
An apparatus and method for controlling and scheduling processing machines |
| 摘要 |
<p>Selected lots and selected process resource are chosen that are available to be processed by the process resource and that are available to process the selected lots respectively. For each of the combination of selected process and selected lots a tool score and a lot score is determine and combined in order to select a winning score. The factory is controlled through the process resource in accordance with the winning score.</p> |
| 申请公布号 |
EP0679972(B1) |
申请公布日期 |
1999.12.15 |
| 申请号 |
EP19950302897 |
申请日期 |
1995.04.28 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
KLINE, PAUL J.;MARTIN, CYNTHIA C.;KILGORE, MICHAEL A. |
| 分类号 |
B23Q41/08;B65G61/00;G05B13/02;G05B15/02;G05B19/02;G05B19/418;G06Q50/00;H01L21/02;H01L21/66;(IPC1-7):G05B19/418 |
主分类号 |
B23Q41/08 |
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