发明名称 |
OPTICAL SYSTEM FOR OPTICAL BEAM SCANNING |
摘要 |
The present invention is directed to an optical system for measurement of a three dimensional device. The optical system is designed and configured to meet telecentric and f-.theta. requirements. The system employs primary and secondary mirrors operating in conjunction with a tertiary deflector mounted on a pivot. Light from a light source produces a beam which is deflected off the deflector and the secondary and primary reflectors respectively. The beam is then transmitted to the surface of the object to be measured. Deflection of the tertiary deflector on the pivot results in scanning of the light beam across the surface of the object to be measured.
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申请公布号 |
CA2240658(A1) |
申请公布日期 |
1999.12.15 |
申请号 |
CA19982240658 |
申请日期 |
1998.06.15 |
申请人 |
INSTITUT NATIONAL D'OPTIQUE;UNIVERSITE LAVAL |
发明人 |
THIBAULT, SIMON;BORRA, ERMANNO;SZAPIEL, STAN |
分类号 |
G02B26/10;(IPC1-7):G02B26/10;G01B11/00;G02B13/22 |
主分类号 |
G02B26/10 |
代理机构 |
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主权项 |
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地址 |
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