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经营范围
发明名称
HEATER STRUCTURE FOR SEMICONDUCTOR DRY PROCESS
摘要
申请公布号
KR100234881(B1)
申请公布日期
1999.12.15
申请号
KR19970013233
申请日期
1997.04.10
申请人
SEJONG ELECTRONICS CO.LTD.
发明人
LEE, HAE-KWANG
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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