DOOR OPEN & CLOSE APPARATUS OF CHAMBER,申请号KR19970008978-传众专利搜索

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发明名称	DOOR OPEN & CLOSE APPARATUS OF CHAMBER
摘要
申请公布号	KR100234910(B1)	申请公布日期	1999.12.15
申请号	KR19970008978	申请日期	1997.03.17
申请人	SAMSUNG ELECTRONICS CO, LTD.	发明人	KIM, DONG-HO;AHN, WOUNG-KWAN
分类号	H01L21/68;(IPC1-7):H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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