DEVELOPING APPARATUS AND DEVELOPING METHOD,申请号KR19970004733-传众专利搜索

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发明名称	DEVELOPING APPARATUS AND DEVELOPING METHOD
摘要
申请公布号	KR100235103(B1)	申请公布日期	1999.12.15
申请号	KR19970004733	申请日期	1997.02.17
申请人	DAINIPPON SCREEN SEIJO K.K.	发明人	CHUJI, MASAO
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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