WET STATION FOR SEMICONDUCTOR PROCESS,申请号KR19940033504U-传众专利搜索

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发明名称	WET STATION FOR SEMICONDUCTOR PROCESS
摘要
申请公布号	KR200163015(Y1)	申请公布日期	1999.12.15
申请号	KR19940033504U	申请日期	1994.12.09
申请人	HYUNDAI ELECTRONICS IND. CO.,LTD	发明人	LEE, JAE-HONG;IN, JUNG-HWAN;KIM, KWANG-CHUL
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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