APPARATUS FOR COATING SUBSTRATEA IN A VACUUM,申请号KR19960032951-传众专利搜索

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发明名称	APPARATUS FOR COATING SUBSTRATEA IN A VACUUM
摘要
申请公布号	KR100235573(B1)	申请公布日期	1999.12.15
申请号	KR19960032951	申请日期	1996.08.08
申请人	BALZERS UND LEYBOLD DEUTSCHLAND HOLDIN	发明人	YOHEIM, STCHKCHIRBOBSKI;GOETZ, TESCHNER
分类号	C23C14/34;C23C14/40;H01J37/34;H05H1/46;(IPC1-7):H01J9/20	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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