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发明名称
WAFER CASSETTE HAVING THE BOX FUNCTION
摘要
申请公布号
KR100234359(B1)
申请公布日期
1999.12.15
申请号
KR19950021390
申请日期
1995.07.20
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
AHN, JUNG-SAM;HONG, SA-MOON
分类号
B65D85/86;H01L21/673;H01L21/68;(IPC1-7):H01L21/68
主分类号
B65D85/86
代理机构
代理人
主权项
地址
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