Apparatus for processing a work piece with a uniformly neutralised ion beam

摘要

In order to uniformly neutralize a large current and a large diameter ion beam so as to irradiate an ion beam having a reduced beam divergence on a process target. An ion beam processing apparatus comprises an ion source (1) with an extraction electrode (6,9), a processing chamber (13) for accommodating a process target (27), and an annular microwave neutralizer (14) with an annular electrode (47) disposed around the ion beam. <IMAGE>