CLEANING SOLUTION AND CLEANING METHOD FOR SEMICONDUCTOR DEVICE,申请号KR19970002681-传众专利搜索

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发明名称	CLEANING SOLUTION AND CLEANING METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号	KR100234403(B1)	申请公布日期	1999.12.15
申请号	KR19970002681	申请日期	1997.01.29
申请人	SAMSUNG ELECTRONICS CO, LTD.	发明人	JANG, KYU-HWAN;LEE, MOON-HEE;SONG, JAE-IN;PARK, HEUNG-SOO
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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