Trimming capacitor having a void located within the dielectric

摘要

A trimming capacitor with less drop in Q due to laser trimming, wherein a non-reducing ceramic material which can be sintered either within a neutral atmosphere or a reducing atmosphere is used as the material of the ceramic dielectric. A trimming capacitor electrode is provided on the surface of or within a ceramic dielectric containing internal capacitor electrodes. Part of the trimming capacitor electrode is removed by a laser beam to reduce an area thereof facing the internal capacitor electrode, to adjust the electrostatic capacitance to a desired value. The use of non-reducing ceramic material reduces the amount of dielectric material that is converted to semiconductor material during laser trimming.