发明名称 |
Adherent separator for self-defining discontinuous film |
摘要 |
An adherent separator structure with a post projecting from a surface which may be a substrate, and a separator adhering to the post, the separator spaced a distance above the surface. A discontinuous film is then formed in a single process step having a first portion on the substrate and a second portion on the post, the discontinuity proximate to and caused by the separator. The structure is made into a stacked capacitor with the second (post) portion of the discontinuous film being the bottom electrode, by forming a continuous dielectric layer on the bottom electrode and a continuous top electrode layer on the dielectric layer.
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申请公布号 |
US6002575(A) |
申请公布日期 |
1999.12.14 |
申请号 |
US19970865534 |
申请日期 |
1997.05.29 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
KOTECKI, DAVID E.;MA, WILLIAM H. |
分类号 |
H01L21/02;(IPC1-7):H01G4/06;H01G4/20;H01G4/10 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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