| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator applicable effectively to flow controller, in which displacement of an actuator element decreases as the applying voltage increases. SOLUTION: This actuator comprises a laminate piezoelectric actuator element 11 located at a drive section, and a displacement inverting mechanism for decreasing displacement of the actuator element 11 as the applying voltage thereof increases. The displacement inverting mechanism comprises a transmission rod 16, which is disposed in a through-hole of the element 11 through a gap, a holder 13 for transmitting the displacement while inverting on one end face through the transmission rod 16, a holder 14 for transmitting the inverted displacement from one end face of the holder 13 to the opposite end face, and a spring member 12 for coupling the holders 13, 14. The transmission rod 16 has one end secured integrally to holder 13 and the other end which penetrates through the holder 14. The holder 14 is provided with a part 17, abutting against the other end of the transmission rod 16 to take out the inverted displacement. |
