发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a technology which can realize the high-reliability DRAM by improving the refleshing characteristics without complicating the manufacturing process. SOLUTION: A p-type semiconductor region 24 for adjusting a threshold voltage is formed only at a p-type well 4 on the side of a data line 18 of a memory-cell selecting MISFET(metal-insulator semiconductor field-effect transistor) Qs. The impurity concentration of the p-type well 4 on the side of an information storing capacitor element is set so that the concentration is lower than the impurity concentration of the p-type well on the side of the data line 18. This, 1.1 V of the threshold voltage of the memory-cell selecting MISFET Qs is obtained. An the same time, the junction electric-field intensity an the end of a gate electrode 7 on the side of the information storing capacitor element can be decreased.
申请公布号 JPH11345947(A) 申请公布日期 1999.12.14
申请号 JP19980152538 申请日期 1998.06.02
申请人 HITACHI LTD 发明人 OYU SHIZUNORI;ASAKURA HISAO;KAWAKITA KEIZO
分类号 H01L29/78;H01L21/8238;H01L21/8242;H01L27/092;H01L27/108 主分类号 H01L29/78
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