| 发明名称 |
Metal alkoxyalkoxidecarboxylates and use to form films |
| 摘要 |
Metal alkoxyalkoxidecarboxylates wherein the alkoxy portion has 2-6 carbon atoms and the alkoxide portion has 2-6 carbon atoms are provided and are useful in forming films on a substrate.
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| 申请公布号 |
US6002031(A) |
申请公布日期 |
1999.12.14 |
| 申请号 |
US19980148613 |
申请日期 |
1998.09.04 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
DUNCOMBE, PETER RICHARD;NEUMAYER, DEBORAH ANN |
| 分类号 |
C07C53/126;(IPC1-7):C07F19/00;C07F3/00;C07F15/00 |
主分类号 |
C07C53/126 |
| 代理机构 |
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| 主权项 |
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