| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxygen concentration sensor which can detect the oxygen concentrations in atmospheres to be measured at a low temperature and can remark ably save energy by making the constitution of its heating section simpler by laminat ing a first electrode, thin film solid electrolyte, and a gas-permeable second electrode upon an electrical insulating gas-impermeable substrate. SOLUTION: An oxygen concentration sensor 1 is constituted by laminating a first electrode 3 made of platinum, a thin film solid electrolyte 4 composed of a composite oxide having oxygen ion conductivity, and a second electrode 5 made of platinum and built in a gas-permeable structure upon an electrical insulating gas-impermeable alumina substrate 2 and heating the electrolyte 4 with a heater 6. When the potential difference between the electrodes 3 and 5 is measured with a DC voltmeter 7 while the sensor 1 is heated to 100 deg.C and exposed to oxygen-nitrogen mixed gas atmosphere containing oxygen at various concentrations, potential differences corresponding to the oxygen concentrations are generated in spite of the low temperature, 100 deg.C. With such a very simple constitution of simple lamination of thin films, the sensor is made operable at a low temperature and the heat insulating structure for preventing the heating loss of the heater is also made simpler. |
