DEVICE AND METHOD FOR DETECTING REFLECTION LIGHT FROM PROCESSING FACE IN LASER PROCESSING

摘要

PROBLEM TO BE SOLVED: To provide a reflection light detecting device for automatically detecting the completion of piercing with a laser light. SOLUTION: A detector 12 is provided to directly detect a reflection light from a workpiece 11 held by a laser processing device. It is detected that a hole is formed on an insulation layer from the difference of the reflectance of a insulation layer 13 and that of a conductive layer 14. Since an optical system does not exist between the workpiece and the detector, the light other than the reflection light is not erroneously detected.