| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an inspecting device which acquires sample images by use of electron beams and which achieves both the required speed of image pickup action and picture quality. SOLUTION: This inspecting device includes a driveable stage 1 on which a sample is placed, an electron beam irradiation means 2 for irradiating an electron beam over the surface of the sample, a secondary beam detection means 3 which detects a secondary beam consisting of secondary electrons or the like generated from an area irradiated by the electron beam, to create an image of the irradiated area, and a mapping electrooptical system 4 placed between the sample and the secondary beam detection means 3 to focus the secondary beam on the detecting surface of the secondary beam detection means 3. The secondary beam detection means 3 includes a fluorescent part 5, an array of image pickup elements 6 of so-called TDI(time delay integration) method, a two-dimensional image pickup element 7, and a switch means 8 whereby light converted by the fluorescent part 5 is selectively irradiated to either the array of image pick elements 6 or the two-dimensional image pickup element 7.</p> |
