发明名称 |
Methods to control the environment and exposure apparatus |
摘要 |
An exposure apparatus includes an exposure system which transfers a pattern of a mask onto a substrate; a chamber in which the exposure system is housed; an air-conditioner which is associated with the chamber and which air-conditions the chamber; and a noise eliminating device which is arranged between the exposure system and the air-conditioner and which eliminates at least a portion of the noise components near a resonant frequency of the exposure system from noise that is generated in the air-conditioner.
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申请公布号 |
US6002987(A) |
申请公布日期 |
1999.12.14 |
申请号 |
US19970824467 |
申请日期 |
1997.03.26 |
申请人 |
NIKON CORPORATION |
发明人 |
KAMIYA, SABURO;KOBAYASHI, NAOYUKI |
分类号 |
G03F7/20;H05K7/20;(IPC1-7):G01K11/16;G03B27/52;G03B27/42 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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