发明名称 SINGLE CRYSTAL PRODUCTION EQUIPMENT AND PRODUCTION OF SINGLE CRYSTAL USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an equipment which is used for subjecting each of containers filled with a single crystal raw material to heat treatment to produce a single crystal and capable of preventing compositional segregation, formation of different kinds of crystals and deviation of crystal orientation from being caused in the single crystal and, concurrently, mass-producing such single crystals. SOLUTION: This equipment is provided with: plural containers 7A, 7B, 7C, 7D, 7E, and 7F each filled with a raw material; heat treatment devices 5A, 5B, 5C, 5D, 5E, and 5F corresponding to the containers 7A, 7B, 7C, 7D, 7E, and 7F, respectively; an elevating/lowering drive device 4; and a connection member 3 for mechanically connecting the elevating/lower drive device 4 to at least one of the group of the plural containers 7A to 7F and the group of the plural heat treatment devices 5A to 5F. The production method comprises: operating the elevating/lowering drive device 4 to vertically move each of the containers 7A to 7F relatively to the corresponding one of the heat treatment devices 5A to 5F; passing each of the containers 7A to 7F through the corresponding one of heat treatment regions 6A, 6B, 6C, 6D, 6E and 6F formed by the heat treatment devices 5A, 5B, 5C, 5D, 5E, and 5F, respectively, to continuously form a molten zone in the raw material, to solidify the formed molten zone and to continuously form a single crystal.
申请公布号 JPH11343194(A) 申请公布日期 1999.12.14
申请号 JP19990070269 申请日期 1999.03.16
申请人 NGK INSULATORS LTD 发明人 OUCHI RYUICHI;IMAEDA MINORU
分类号 H01L21/368;C30B11/00;C30B13/16;C30B29/46 主分类号 H01L21/368
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