| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the productivity by sputtering a specified indium oxide-tin oxide sintered body and depositing the atoms or molecules of the sintered body as a transparent conductive film on a color filter having plural color resin which are two-dimensionally arranged. SOLUTION: The color filter 1 is provided with a transparent glass substrate 2, a black matrix(BM) 30 deposited on the transparent glass substrate 2, an overcoat layer 7 formed on the BM 30, and a transparent conductive film 8 formed on the overcoat layer 7. Namely in this case, the color filter with the transparent conductive film is produced by sputtering an indium oxide-tin oxide sintered body having 85 to 97 wt.% In2 O3 and >=98% In2 O3 density and depositing the atoms or the molecules of the sputtered sintered body as the transparent conductive film 8 on the color filter having plural color resins which are two-dimensionally arranged. Therefore, the transmittance of the film is improved and the film can be stably formed.</p> |
