| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a biaxial moving device which is high in straightness and rigidity, excellent in motion reproducibility, and inexpensive. SOLUTION: In biaxial moving device provided with a moving body 13 in X-direction and a moving body 20 in Y-direction, one moving body 13 is supported on a base body 10 through a roller guide bearing LG, and the other moving body 20 is supported on the base body 10 through a static gas bearing 22. The load on the moving body 20 is not loaded on the moving body 13 thereby, or no eccentric load is applied to the moving body 13 while the moving body 20 is moved to obtain the high straightness, high rigidity and high reproducibility. A magnetic attraction part in the vertical direction is provided between surfaces opposite to each other of the moving body 13 and the moving body 20, and the high rigidity is obtained by forming the base body 10 of a ceramic to prevent the seizure, and the degradation in accuracy of the bearing motion due to the secular change and plastic change of the base body.</p> |
