| 摘要 |
PROBLEM TO BE SOLVED: To provide a joined body in which any cracks are not caused in a ceramic member and any peeling of a metallic member is not caused, even when the joined body is affected by a thermal history of heating/cooling during operation using the body, and also to provide a ceramic heater which consists of the joined body formed by joining a metal fitting for an electrode to a ceramic heating element and is capable of maintaining high joining strength without causing abnormal heat generation or disconnection due to the change in resistance of a heating resistor, and also, excellent in thermal shock resistance and high temp. stability, and further, has good rapid heating-up characteristics and is appropriate for high temp. use. SOLUTION: This joined body 1 is formed by joining a ceramic member 2 to a metallic member 3 through a metallic layer 4 which has a 20 to 200μm thickness (7) and into which the component 6 of the metallic member 3 is diffused to a <=10μm depth from an interface 5 between the metallic member 3 and the metallic layer 4, in such a way that only the surface side 8 of the metallic member 3, which is abutted on the ceramic member 2, is bonded to the metallic layer 4. The ceramic heater 9 is formed by joining a ceramic heating element 10 consisting of an insulator 14 and a heating resistor made of an electrically conductive material, to a metal fitting 11 for an electrode through a similar metallic layer 4.
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