发明名称 |
Method for polishing a composite comprising an insulator, a metal, and titanium |
摘要 |
A process is provided for polishing a composite comprised of an insulating layer, a metal and titanium in which the composite is polished in a standard polishing machine using an aqueous slurry comprising submicron abrasive particles, an iodate, and a peroxide. Another process is provided in which peroxide is added to the aqueous slurry only when a titanium or titanium nitride layer is being polished. Further the invention also comprises the addition of a base to the slurry stream exiting the polishing machine to bring the pH of the used slurry to about 7 or higher.
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申请公布号 |
US6001269(A) |
申请公布日期 |
1999.12.14 |
申请号 |
US19970859132 |
申请日期 |
1997.05.20 |
申请人 |
RODEL, INC. |
发明人 |
SETHURAMAN, ANANTHA R.;COOK, LEE MELBOURNE;WANG, HUEY-MING;WU, GUANGWEI |
分类号 |
C09G1/02;C09K3/14;C23F3/00;H01L21/304;H01L21/306;H01L21/321;(IPC1-7):B24B1/00 |
主分类号 |
C09G1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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