| 摘要 |
It is the object of the invention to integrally conform functions of devices of optical fiber types with those of SiO2 waveguides, miniaturize optical devices and provide optical waveguide devices with various optical functions. A SiO2 waveguide, which is composed of a SiO2 waveguide clad with low refractive index and a SiO2 waveguide core with high refractive index, is formed on a Si substrate. The core and the clad on an area, where the direction of the core coincides with the orientation of crystallization of a Si substrate, are removed. A V-groove is formed along the orientation of crystallization of the exposed Si substrate. Both the end surfaces of an optical fiber grating, which is fitted in the V-groove, face those of the remaining SiO2 waveguide. The cores of the SiO2 waveguides and the optical fiber grating are optically coupled with each other. |
