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发明名称
摘要
申请公布号
JP2990113(B2)
申请公布日期
1999.12.13
申请号
JP19970170400
申请日期
1997.06.26
申请人
YAMAGATA NIPPON DENKI KK
发明人
IGARASHI KINICHI
分类号
H01L21/66;G01R31/28;(IPC1-7):H01L21/66
主分类号
H01L21/66
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