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发明名称
摘要
申请公布号
JP2989986(B2)
申请公布日期
1999.12.13
申请号
JP19930061677
申请日期
1993.03.22
申请人
SANYO DENKI KK;APURAIDO MATERIARUZU JAPAN KK
发明人
NISHIDA ATSUHIRO;FUJIWARA HIDEAKI;SUZUKI KOJI;NAGASAWA HIDEJI;MAMENO KAZUNOBU
分类号
H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
H01J37/317
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