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发明名称
摘要
申请公布号	JP2988746(B2)	申请公布日期	1999.12.13
申请号	JP19910173658	申请日期	1991.07.15
申请人	TOSHIBA KK	发明人	ATSUMI KOICHIRO;KASHIMA NORYASU;IKETANI YUKIHIRO
分类号	H01L21/56;(IPC1-7):H01L21/56	主分类号	H01L21/56
代理机构		代理人
主权项
地址

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