| 摘要 |
<p>PROBLEM TO BE SOLVED: To effectively let charges escape and restrain generation of plasma to a lift pin, by constituting the lift pin of insulating ceramics, including a conductor, metallizing either an upper end or a lower end, and soldering metal on the metallized end. SOLUTION: A lift pin 7 is constituted as a conductor including type which is composed of insulating ceramics such as alumina, zirconia, aluminum nitride, and silicon nitride, and holds a conductor 22 composed of conductive material such as tungsten and titanium nitride in a center axis direction. An outer screw 23 is formed on the outer periphery of either one of a lower end portion or an upper end portion, a metallized layer 24 is formed on either one of a lower end surface and an upper end surface, and a metal cap 25 in which an inner screw and an outer screw are formed is screwed from the upper part of the metallized layer 24 and soldered. Thereby charges are effectively let escape, generation of plasma over the lift pin 7 can be restrained, and adverse influence on a held member which is to be caused by residual plasma can be excluded.</p> |
