PATTERN FORMING METHOD OF INORGANIC MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a pattern forming method of an inorg. material with good accuracy at a low cost. SOLUTION: This method include at least a first process to apply slurry containing inorg. powder of 0.1 to 100 μm average particle size on a base body, a second process to irradiate only a necessary part of the applied slurry with laser light to fix the inorg. powder to the base body, and a third process to remove the part of the applied slurry not irradiated with laser light. By this method using laser, formation of a pattern with high accuracy at a low cost is possible compared to conventional screen printing method having problems of the pattern accuracy and conventional thin film method having problems of the cost.