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发明名称
PROBER
摘要
申请公布号
JPH11337572(A)
申请公布日期
1999.12.10
申请号
JP19980147988
申请日期
1998.05.28
申请人
CANON INC
发明人
ARIGA TORU;FUJIMURA HIDEHIKO;OGURA MASAAKI
分类号
G01R1/06;G01R1/073;G01R31/28;G02F1/13;G02F1/1345;(IPC1-7):G01R1/06;G02F1/134
主分类号
G01R1/06
代理机构
代理人
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