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发明名称	FORMATION OF ISOLATION STRUCTURE
摘要
申请公布号	JPH11340317(A)	申请公布日期	1999.12.10
申请号	JP19990130429	申请日期	1999.04.01
申请人	TEXAS INSTR INC <TI>	发明人	JOYNER KEITH A
分类号	H01L21/302;H01L21/3065;H01L21/318;H01L21/76;H01L21/762;(IPC1-7):H01L21/76;H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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