| 摘要 |
PROBLEM TO BE SOLVED: To obtain a thin film for a solar cell having a good generating efficiency by forming a semiconductor thin film of a low cost having good crystallinity. SOLUTION: The method for manufacturing a thing film for a solar cell (Fig. (K)) comprises a step (Figs. (A) to (C)) of forming an isolation film 3 having a window 4 for epitaxially growing on a single crystal substrate 1, a step (Figs. (D) to (E)) of forming a semiconductor thin film on the film 3 by epitaxially growing via the window 4 under the condition where a scarcely epitaxially growing etching window former 5 is ridden on the film 3, a state (Fig. (I)) of forming an etching window 8 by removing the former 5 after forming the semiconductor thin film, and a step of isolating the semiconductor thin film and the substrate 1 by removing the film by etching from the window 8. |
