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发明名称
SHUTTER MECHANISM OF LIGHT IRRADIATION DEVICE
摘要
申请公布号
JPH11338005(A)
申请公布日期
1999.12.10
申请号
JP19980161543
申请日期
1998.05.27
申请人
USHIO INC
发明人
UENO TAKANAO
分类号
G03B9/08;G03F7/20;H01L21/027;(IPC1-7):G03B9/08
主分类号
G03B9/08
代理机构
代理人
主权项
地址
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