| 摘要 |
PROBLEM TO BE SOLVED: To prevent a crack of a gas sensor caused by thermal shock from being generated. SOLUTION: This manufacturing method comprises the following steps. A paste is used for forming a diffusion controlled layer 12 and a supporting layer 14 on a green sheet wherein the paste becomes a porous body after firing. The green sheet becomes solid electrolytic substrates 4a and 6a forming an oxygen concentration cell element 4 and an oxygen pump element 6 after firing. The diffusion controlled layer 12 makes a measuring gas chamber 10 communicate with the outer space. The supporting layer 14 prevents a space to be the measuring gas chamber 10 from being collapsed at manufacturing. The paste is screen-printed so as to cover the whole of circumference of an area to be coated with carbon to form the measuring gas chamber 10. The green sheet is laminated and press-adhered to be done firing having the carbon coated area inside and an oxygen sensor 2 is manufactured having a space formed by subliming of the carbon as the measuring gas chamber 10. The whole of circumference of the measuring gas chamber 10 is encircled by the same porous body. Stress from expansion and contraction of the green sheet at firing therefore is not concentration on a specific area. |
