| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a producing device for semiconductor device for forming alignment keys in a scribe line area. SOLUTION: Concerning this producing method, when a semiconductor substrate having a plurality of chip areas defined by the scribe line area is provided and at least one integrated circuit is to be formed in each chip area, the plurality of alignment keys to be used are formed in the scribe line areas, and at least one alignment key 11 among the alignment keys is formed on a material composing of the integrated circuit.</p> |
