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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11340223(A)
申请公布日期
1999.12.10
申请号
JP19980141302
申请日期
1998.05.22
申请人
SONY CORP
发明人
MIYANAGA TAKASHI
分类号
H01L21/31;H01L21/318;(IPC1-7):H01L21/318
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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