| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus for clamping a substrate which is capable of accurately clamp a substrate and avoiding friction of guide grooves and breaks of the substrate. SOLUTION: A vertical clamping step of lifting a backup member 73 to stepwise push a substrate S up, until the substrate S introduced to specified position with its both side edges guided by U-shaped guide grooves 44 abuts the top faces of the guide grooves 44, substrate moving step of repeatedly moving a clamp member 46a reciprocally in the widthwise direction of the substrate S each time of the stepwise pushing operation, and lateral clamping step of moving the clamp member 46a fore in the widthwise direction of the substrate S to finally push the substrate S to the side face of one guide groove 44, are comprised. |
