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发明名称
DEVICE AND METHOD FOR EXPOSURE
摘要
申请公布号
JPH11339329(A)
申请公布日期
1999.12.10
申请号
JP19980146375
申请日期
1998.05.27
申请人
SONY CORP
发明人
SATO MANABU;NOMURA HIROSHI;ENDO FUSAAKI;OZAWA SHIROTAKA
分类号
G11B7/26;(IPC1-7):G11B7/26
主分类号
G11B7/26
代理机构
代理人
主权项
地址
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