| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor having excellent detecting sensitivity, capable of expecting a mass production effect with a simple constitution, and relatively easily satisfying the dimensional accuracy of a vibrator for determining substantial characteristics as the sensor. SOLUTION: The angular velocity sensor 1 comprises a quadrangular prismatic vibrator 1a obtained by laminating a ferrite part 2 and a piezoelectric ceramic part 3a of a piezoelectric material, and a piezoelectric element 3 constituted of an electrode 4 of a side face 2a of the opposed part 2, electrodes 3b, 3c arranged on the side face 3a1 of the part 3a and the part 2 in the vibrator 1a. A voltage is applied between the electrode 4 and the electrodes 3b, 3c to vibrate the vibrator 1a by the element 3 in the sensor 1, and an angular velocity is detected by detecting a Coriolis' force generated at the vibrator 1a by the element 3. |
