| 摘要 |
<p>PROBLEM TO BE SOLVED: To facilitate the replacing work of a chemical filter in a chemical clean stocker. SOLUTION: A chemical clean stocker is constituted of a main body 21 and a chemical filter unit 22 which is installed separately from the main body 21 and connected to the main body 21 through a supply duct 23. The main body 21 is provided with storage shelves for articles to be stored, a stacker, an air blower, and an HEPA or ULPA filter for removing fine particles in such an casing 1 that can be maintained in an airtight state. The filter unit 22 is provided with an air blower which supplies air to the main body 21 through the supply duct 23 and a chemical filter which removes chemical substances by adsorption. The air supplied to the main body 21 is circulated by returning the air to the filter unit 22 through a return duct 24. The stocker is constituted in such a way that pressurizing air can be introduced to the filter unit 22 for maintaining the inside of the main body 21 at a positive pressure.</p> |
