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发明名称
PROBE STRUCTURE
摘要
申请公布号
JPH11337577(A)
申请公布日期
1999.12.10
申请号
JP19980148551
申请日期
1998.05.29
申请人
AMP JAPAN LTD
发明人
NAITO TAKEKI
分类号
G01R31/26;G01R1/067;G01R1/073;H01L21/66;(IPC1-7):G01R1/073
主分类号
G01R31/26
代理机构
代理人
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地址
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