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发明名称
SEMICONDUCTOR DEVICE AND FABRICATION THEREOF
摘要
申请公布号
JPH11340457(A)
申请公布日期
1999.12.10
申请号
JP19980144417
申请日期
1998.05.26
申请人
MATSUSHITA ELECTRON CORP
发明人
YOSHIDA HIDEAKI
分类号
H01L29/41;H01L21/8234;H01L27/088;H01L29/78;(IPC1-7):H01L29/78;H01L21/823
主分类号
H01L29/41
代理机构
代理人
主权项
地址
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