Wafer rack support used in oven for e.g. chemical vapor deposition, contains mantle core comprising opaque quartz and transparent ceramic sleeve parts

摘要

The mantle for the support core (2) comprises at least two sleeve-shaped parts positioned on top of each other in the vertical direction, one part comprising opaque quartz and the other part comprising a transparent ceramic material. A support (9) for a wafer rack (11) or another type of object holder mountable in a vertical treatment oven (1) is provided with means in its top side for receiving the rack, and with means in its bottom side for resting it on top of the oven door panel (7). A core of insulation material extends between the top and bottom sides of the support and is surrounded by a quartz mantle. The mantle comprises at least two sleeve-shaped parts positioned on top of each other in the vertical direction, one part comprising opaque quartz and the other part comprising a transparent ceramic material. An Independent claim is also included for an oven arrangement used for high temperature treatment of substrates, containing an opening (4) in its underside closed with a door panel provided with means for receiving the wafer rack support.