| 摘要 |
PROBLEM TO BE SOLVED: To provide a high accuracy semiconductor angular velocity sensor in which the leak to the sensor output by a drive signals is eliminated to avoid the zero point drift and a manufacturing method thereof. SOLUTION: A frame 2 which is separated upward from a board 90 and swingable in direction Y and a plumb 3 swingable in the direction Y, together with the frame 2 and displaceable in direction X are provided, insulators 29 are formed on the frame 2 to section into semiconductor parts 21-24, comb-like electrodes 27 are provided on the semiconductor parts 22, 23, so that the semiconductor parts 21, 24 may be conductive with the plumb 3, and a comb-like electrode 31 is provided on the plumb 3. When only the oscillation drive is applied to the frame 2, the plumb 3 and frame 2, i.e., the comb-like electrodes 31, 27 oscillate together and hence it never becomes a leak signal to the capacitance detection. When an angular velocity is applied, the plumb 3 shifts in the direction X to the frame 2 due to the Coriolis force, and hence the angular velocity can be detected from the change of the capacitance. |
